Measuring Room
Measuring Room
- Base: High-precision granite platform
- Measuring stroke (X.Y.Z) Three axes: 300mm 200mm 200mm
- Stage Size: 505 mm * 355 mm
- Carrying weight: 25Kg
- Transmission mode:
- X. Y. Z axis servo motor
- Maximum moving speed:
- X. Y. Z-axis 120 mm / sec
- Optical ruler:
- X. Y. Z-axis, resolution 0.5um
- X. Y. Z-axis, (3 + L / 150) μm
- Body: C-type structure
- Appearance size:
- 1070mm 850mm 1900mm